Technologies
Thin-film circuits - MCM and related techniques
Article REF: E3366 V1
Technologies
Thin-film circuits - MCM and related techniques

Author : Michel MASSÉNAT

Publication date: May 10, 2003 | Lire en français

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2. Technologies

2.1 Fabrication techniques and thin-film physics

Readers are also invited to consult the article for all aspects of thin-film production techniques and physics:

  • deposit methods ;

  • growth and nucleation ;

  • adhesion and stress ;

  • design and production methods ;

  • thin-film stability.

There's also a section dedicated to the production of single-layer thin films, or what we call "traditional" thin films. In particular, the main deposition methods are described:

  • thermal evaporation ;

  • ...

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