6. Glossary
Thermogravimetry; thermogravimétrie
A technique for measuring, as a function of time or temperature, the mass of a sample heated or cooled according to a specific temperature program.
ICP-MS (inductively coupled plasma-mass spectrometer )
A mass spectrometer used to determine the nature of a material, which analyzes the ions formed when elements in a sample pass through an inductively coupled plasma.
MOEMS
Micro-opto-electromechanical systems
CMOS (Complementary Metal Oxide Semiconductor )
CVD (Chemical Vapor Deposition)
Chemical Vapor Deposition
PVD (Physical Vapor Deposition)
Physical vapor deposition
PLD (Pulsed Laser...
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