6. Ion beam analysis
Ion beams are widely used to analyze and characterize materials. Ion Beam Analysis (IBA) encompasses all the techniques associated with each product/effect of ion/matter interaction (see figure
22
).
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Ion beam analysis
Bibliography
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(1) - KOSTLER (H.), TRAVERSE (A.), NEDELLEC (P.), DUMOULIN (L.), RUAULT (M.-O.), SCHAPBACH (L.), BURGER (J.P.), BERNAS (H.) -
A new hydride : MgHx prepared by ion implantation.
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Journal of Physics : Condens. Matter, Institut Of Physics (IOP) Publishing Ltd, 3, p. 8767-8776 (1991).
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(2)...
Directory
Manufacturers – Suppliers – Distributors (non-exhaustive list)
Main suppliers of commercial implanters or implant services
Axcelis Technologies, Beverly, MA, USA :
http://www.axcelis.com
Applied Materials, Horsham, United Kingdom :
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Conclusion
