Modification and synthesis of materials by layout
Ion beams - Applications
Quizzed article REF: M4396 V2
Modification and synthesis of materials by layout
Ion beams - Applications

Author : Erwan OLIVIERO

Publication date: December 10, 2021, Review date: July 19, 2022 | Lire en français

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3. Modification and synthesis of materials by layout

3.1 Formation of buried metal layers

At high doses, doping ions, implanted in a matrix under appropriate experimental conditions (matrix temperature, ion energy and flux), enable alloy layers to be synthesized at a controlled depth. .

This method is used in particular in silicon to form buried layers of metal silicides by implantation of Ni, Co or Fe. The various stages...

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