1. General presentation

In addition to the information on crystalline defects and corresponding crystallography available in the image and diffraction modes, transmission electron microscopy enables chemical analysis of the same area of the sample. The chemical analysis methods used in TEM are based on the inelastic interaction of incident electrons with the electron cloud of the atoms in the sample under study (figure 1 ). By inelastic interaction we mean interaction with the electron pattern of atoms (deep or superficial electrons, conduction electrons) which are transiting towards excited states. In the following, we focus on the energy losses associated with ionization...