Overview
ABSTRACT
In order to understand the properties of materials, the local chemical analysis in electron microscopy is increasingly used. This article presents the two techniques with which current microscopes are equipped and the analysis of characteristic X-rays and energy-loss spectrometry, in a concrete way. Within the energy loss section, low-energy transitions such as plasmon excitation, interband transition or the Cherenkof effect are not dealt with. Only the use of ionization thresholds characteristics of atoms is presented.
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Miroslav KARLÍK: Czech Technical University in Prague
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Bernard JOUFFREY: École Centrale Paris
INTRODUCTION
Local chemical analysis using electron microscopy (TEM and STEM) is increasingly used to understand the properties of materials. This dossier provides a practical description of the two techniques used in today's microscopes: characteristic X-ray analysis (EDXS – energy dispersive X-ray spectroscopy) and energy loss spectrometry (EELS – electron energy loss spectrometry).
In the energy loss section, low-energy transitions (plasmon excitations, interband transitions, Cerenkov effect, etc.) are not covered.
Only the use of ionization thresholds characteristic of atoms is covered.
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Study of metals by transmission electron microscopy (TEM)
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