3. Energy dispersive X-ray spectroscopy

Energy dispersive X-ray spectrometry (EDXS) uses the characteristic X-rays generated in a sample irradiated by an electron beam to identify chemical elements. R. Castaing was the first to apply Moseley's law with his microprobe (the subject was suggested to him by A. Guinier). R. Castaing used a dispersive system (crystal) to identify characteristic X-ray photons.

The energy range studied in a single acquisition (0 to 20 keV) is wider than in electron energy loss spectroscopy (EELS) [16][17] . On the other hand, the energy resolution of EDXS (130 eV for a line at 10 keV) is about two orders of magnitude lower than that of EELS. It is therefore not possible to study the effects of atomic bonding, and EDXS is limited to determining elemental chemical...