3. Characteristics of the deposits obtained
3.1 Nature
It depends on the production process and the chemical reactions that take place when the deposit is formed:
directly from the gas phase (homogeneous reactions), without reaction of the deposit with the substrate or diffusion in the solid state, it consists of a layer of metals, nitrides, silicides, borides, carbides, oxides, etc., depending on the case (figure 5 ).
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Characteristics of the deposits obtained
CVD versus other deposition processes
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