Chemical reactions
Chemical deposits from the gas phase
Article REF: M1660 V2
Chemical reactions
Chemical deposits from the gas phase

Author : Thierry BELMONTE

Publication date: September 10, 2010 | Lire en français

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1. Chemical reactions

Three types of chemical reactions are likely to occur during gas-phase deposition. These are listed in Table 1 , together with the main characteristics associated with them.

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