2. Commonly used circuit topologies for high-power pulse generation
The circuit topologies commonly used for the generation of low-pressure plasmas in the HiPIMS regime and, subsequently, for the generation of the bipolar HiPIMS regime, are discussed in this chapter.
Firstly, the circuit topology of a HiPIMS-type power supply (also called plasma source or generator) is shown in its simplest configuration in figure 2 .
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Commonly used circuit topologies for high-power pulse generation
Arc management in a HiPIMS process
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