Synthesis of titanium and titanium dioxide films
Bipolar high-power impulse magnetron sputtering
Research and innovation REF: IN251 V1
Synthesis of titanium and titanium dioxide films
Bipolar high-power impulse magnetron sputtering

Authors : Matthieu MICHIELS, Stephanos KONSTANTINIDIS, Dominique DECKERS

Publication date: September 10, 2023 | Lire en français

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5. Synthesis of titanium and titanium dioxide films

5.1 Synthesis of metallic titanium films

Increasing the voltage value at the positive pulse during the bipolar HiPIMS regime impacts the structure of metallic titanium films (deposited on doped silicon wafers), as illustrated by Bragg-Brentano X-ray diffraction (XRD) analyses. In this case, a balanced magnetron is used (figure 14 ).

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