3. Experimental setup
A classic installation includes :
a vacuum chamber and its pumping unit;
a vapour phase source;
power supplies for the cathode and the vapor-phase source.
3.1 Vacuum device
The pumping device used depends on the nature of the material to be deposited. If the material is not very sensitive to oxygen or nitrogen, pumping can be carried out by Roots pumps, which provide rapid evacuation and sufficient ultimate pressure (p " 1.5 × 10 – 2 Pa). In most cases, however, deposits are sensitive to residual gases, and a good ultimate vacuum (p " 10 –4 ...
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Experimental setup
Main applications
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