Overview
ABSTRACT
MEMS sensors are microsystems dedicated to the detection or measurement of physical quantities. These components, derived from microelectronics have enabled the integration of functions that could not exist without this technology, in areas as diverse as automotive, mobile phones, pacemakers ... MEMS sensors are designed to transform variations in the values ??of an electrical parameter (resistance, capacitance ...) into an readily usable electrical signal (this signal can be analogue or digital). MEMS technology is based on the production stages of integrated circuits, such as heat treatment for the diffusion of oxidizing or doping species, deposits or photolithography.
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Read the articleAUTHORS
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Gilles AMENDOLA: Research professor at ESIEE Engineering
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Patrick POULICHET: Research professor at ESIEE Engineering
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Laure SEVELY: Research professor at ESIEE Engineering
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Laurie VALBIN: Research professor at ESIEE Engineering
INTRODUCTION
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