2. Spatial resolution and depth of field
2.1 Separating power
The main image is associated with the secondary electrons.
The separating power p, which characterizes the lateral spatial resolution d, is the smallest distance on the object whose conjugate points on the image are distinct. Two image points are only truly distinct if the secondary electron emergence zones associated with each point are also effectively distinct, and if the relative contrast is sufficient.
To optimize the separating power, it is therefore necessary to :
reduce the diameter of the incident electron beam (also known as the spot or electron probe diameter);
limit sources of enlargement...
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Spatial resolution and depth of field
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