Glossary
Comparison of grating size measurements for AFM and SEM calibration

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R6741 V1 Article

Glossary


Comparison of grating size measurements for AFM and SEM calibration

Authors : Alexandra DELVALLÉE, Sébastien DUCOURTIEUX

Publication date: December 10, 2022 | Lire en français

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7. Glossary

Nanoscale; Nanoscale

Scale conventionally from 1 nm to 100 nm.

Scanning electron microscopy (SEM) ;Microscope électronique à balayage (MEB)

Electron microscopy technique for obtaining high-resolution images of the sample surface using electron/matter interaction.

Atomic force microscopy (AFM) ;Microscope à force atomique (AFM)

Microscopy technique for obtaining images of a sample's topography by scanning a sharp tip over its surface.

Métrologie ; Metrology

Measurement science defining methods for ensuring confidence in measurement processes.

Measurement uncertainty

Dispersion of values assigned to a measurand based on the information used.

Calibration...

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