2. Extensions

2.1 Infrared ellipsometry

• Presentation

  Infrared spectroscopic ellipsometry is of great interest because materials in this spectral range behave very differently from those in the visible range:

  • dielectrics display molecular vibration bands, the signature of the molecules making up these layers. These vibrational bands are modeled by one or more harmonic oscillators whose amplitudes give access to the concentrations of the species present in the layer;

  • most semiconductors are transparent;

  • metals and doped semiconductors show a characteristic increase in extinction coefficient with wavelength. This behavior is modeled by...