3. Fields of application

3.1 Microelectronics

In addition to the applications already described in 2 , spectroscopic ellipsometry is used in all fields involving thin films or surface studies [12][18] . Nevertheless, microelectronics is still the field of choice for which this technique is the...

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References

(1) - AZZAM (R.M.A.), BASHARA (N.M.) - Ellipsometry and polarized light. - North Holland (1977).
(2) - ASPNES (D.E.), STUDNA (A.A.) - High precision scanning ellipsometer. - Applied Optics vol. 14, n° 1, janv. 1975.
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