2. Principles of microsystems used in electrical metrology

2.1 Microsystems components

Silicon micromachining is traditionally divided into two categories: surface micromachining and bulk micromachining . The silicon-on-insulator (SOI) process lies between the...

You do not have access to this resource.

Exclusive to subscribers. 97% yet to be discovered!

You do not have access to this resource. Click here to request your free trial access!

Already subscribed? Log in!

Ongoing reading
Principles of microsystems used in electrical metrology

Previous
page Context

DC and low-frequency applications

Article included in this offer

"Electronic measurements and tests"

( 79 articles )

Complete knowledge base

Updated and enriched with articles validated by our scientific committees

Services

A set of exclusive tools to complement the resources

View offer details

References

Books and magazines

(1) - SEPPÄ (H.), KYYNÄRÄINEN (J.), OJA (A.) - Microelectromechanical Systems in Electrical Metrology - . IEEE Trans. Instrum. Meas. 50, pp. 440-444 (2001).
(2) - WOLFFENBUTTEL (R.F.), VAN MULLEM (C.J.) - The Relationship Between Microsystem...

You do not have access to this resource.

Exclusive to subscribers. 97% yet to be discovered!

You do not have access to this resource. Click here to request your free trial access!

Already subscribed? Log in!