2. Keeping precursors separate: SALD frames
The spatial approach has proved to be very versatile from a technical point of view since many reactors have been listed to date. S. Nonobe et al. proposed a horizontal quartz space reactor (see figure 1 in
) for the growth of HfO
2
films on 10 mm × 10 mm silicon substrates
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Keeping precursors separate: SALD frames
Fluid dynamics and SALD: engineering challenges
Article included in this offer
"Technological innovations"
(
190 articles
)
Updated and enriched with articles validated by our scientific committees
A set of exclusive tools to complement the resources
Bibliography
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
