4. SALD applications
To date, several materials have been deposited using SALD reactors, as detailed in Table 1 . Applications range from active and passive components for thin-film transistors (TFTs), to active components for next-generation solar cells. A few examples are briefly described below.
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
SALD applications
Conclusion
Article included in this offer
"Technological innovations"
(
190 articles
)
Updated and enriched with articles validated by our scientific committees
A set of exclusive tools to complement the resources
Bibliography
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
