ALD in Field-Effect Transistors (FETs)
ALD in Microelectronics devices - Evolution and Use in Advanced Micro-Devices

The field-effect transistor (FET) is a fundamental building block of the microelectronics industry. It controls the current between a source and a drain through a semiconductor channel by using an electric field applied by a gate. We will not describe its operation here; readers are referred to[E 2 430].

Since its invention, the FET has undergone major evolutions to meet growing demands for performance and miniaturization. Initially, FETs were planar: the channel was located on the surface of the substrate. Although these devices performed well, they reached their limits of miniaturization at the 28-nm...