Glossary
ALD in Microelectronics devices - Evolution and Use in Advanced Micro-Devices

DRAM; Dynamic Random Access Memory

Memory devices commonly used in electronic devices, located close to the processing core due to their fast access speeds.

High-k Materials

Electrical insulators used in transistors to improve gate control over the channel while reducing current leakage. Their high permittivity allows for maintaining a high gate capacitance at a thin physical thickness.

Flash memory

A family of memory types commonly used in microcontrollers for their data retention capabilities.

Metal interconnect layers; Back End Of Line (BEOL)

Industrial manufacturing steps for interconnections where the thermal budget of the processes cannot exceed 400 °C. Beyond this commonly accepted temperature limit, device reliability defects begin to appear.

Silicon-on-Insulator (SOI)

A type of silicon substrate in which the active region of...