Glossary
Area Selective Deposition - ASD

BEOL; BEOL (Back-End Of Line)

Industrial steps in the fabrication of interconnects.

Mushrooming

Localized isotropic growth leading to the formation of a mushroom-shaped structure.

Encapsulation; capping

A thin layer used to protect the properties of the underlying material.

SAV/FSAV; Self-Aligned Vias / Fully Self-Aligned Vias

Self-aligned filling of contact holes.

Material overhang

Material extending beyond the boundary in one spatial direction.

Pinholes

A defect (hole) sometimes observed during the growth of a thin film.

Vias; vias

Contact holes used for interconnections.