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  5. Characterization of thin films and microbatteries

Article | REF: D3342 V2

Microbatteries -Microsources of energy in thin layers

Authors: Alain LEVASSEUR, Brigitte PECQUENARD, Philippe VINATIER, Raphaël SALOT, Frédéric LE CRAS, Michel MARTIN

Publication date: May 10, 2009, Review date: September 15, 2020 | Lire en français

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    5. Characterization of thin films and microbatteries

    5.1 Thickness, mass

    Thin film thickness is measured using a mechanical profilometer, or can be deduced from RBS (Rutherford Backscattering Spectroscopy) spectra. Determining the mass is an important step in calculating the mass capacitance of the positive electrode. It is carried out with a precision microbalance (± 0.1 μg).

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    5.2 Chemical composition

    Determining the chemical composition of thin films is often an arduous task, involving several techniques depending on the nature of the elements...

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