3. Different types of architecture
3.1 2D microbatteries
2D microbatteries are microbatteries made up of a stack of thin layers on a flat substrate (glass, ceramic, insulated silicon, insulated metal, polymer coated with a moisture barrier layer). Each thin layer has a specific geometry to ensure that the stack is functional.
The desired geometry can be obtained :
or by depositing through a mechanical mask (stencil);
or by means of etching techniques after the deposit has been deposited over the entire substrate surface.
The total thickness of the stack, excluding encapsulation, is a few micrometers. Encapsulation can be achieved :...
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Different types of architecture
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