8. Metamodel-based uncertainty analysis for the micro-pump

8.1 Introduction

Many researchers have carried out in-depth studies into micro-technology. This technique can be used to develop a wide range of small, high-performance systems in fields as diverse as communications, automotive, aerospace, civil engineering and medicine. Smart materials such as piezoelectric materials and shape memory alloys (SMAs) have been used in the design of micro-systems.

The behavior of these materials enables the conversion of mechanical energy into thermal and electrical energy for sensors, and vice versa for actuators. Some micro-systems require an attractive actuator for sensitive applications. AMF actuators seem to be the most widely used for such applications. In fact, this material has a high degree of deformation, which can be...