5. Application
We'll start with radio-frequency microsystems, then move on to optical microsystems. We will then look at sensors and other microsystem applications.
5.1 Radio-frequency microsystems
The first microsystems available on the market were sensors. Then, in view of the electrical and mechanical properties offered by microsystem technologies, new fields of application were explored.
As a result, a multitude of components operating at RF and millimeter-wave frequencies has emerged. These components, often grouped under the common term RF microsystems or RF-MEMS, can be divided into several groups:
components based on surface micromachining, with one part movable relative to another;
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- (1) - - http://www.memsnet.org/links/software.html
- (2) - MADOU (M.) - Fundamentals of Microfabrication. - 752 p. 2002 CRC Press.
- (3) - RAI-CHOUDURY...
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