Definitions
Nanoimprinting and nanomolding
Article REF: NM540 V1
Definitions
Nanoimprinting and nanomolding

Author : Yong CHEN

Publication date: October 10, 2006 | Lire en français

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1. Definitions

Yong CHEN is a professor at the École normale supérieure in Paris and a researcher at the CNRS Photonics and Nanostructures Laboratory (Marcoussis).

  • Today, the microelectronics industry uses projection photolithography to produce high-density integrated circuits (figure 1 ). In research laboratories, the use of contact photolithography is more common: first, a thin layer of photosensitive resin is deposited on a substrate, which is then exposed to ultraviolet (UV) radiation...

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