4. Mould making

The manufacture of molds is a critical step, since the resolution and production rate of nanoimprinting and nanomolding depend largely on the quality of the mold used. The patterns to be printed are all in relief on the surface of a mold, obtained :

• or by electron lithography and reactive ion etching ;

• or by duplicating another prefabricated mold (master).

Finally, surface treatment of the mold is always necessary, whatever the type of application.