3. Process analysis

3.1 Geometric correlation

The shaping of a polymer, by deformation or molding, is accompanied by the transfer of material from one place to another. Given the size of the patterns to be structured, the flow of liquid polymer in a highly confined space between mold and substrate is difficult. In the case of nanoimprinting, the higher the printing speed, the more the polymer displacement is locally limited. In addition, the residual resin thickness at the end of the printing process, h _c , must be minimized so that the RIE transfer does not significantly alter the printed shape. A simple analysis can be used to design a better manufacturing process (figure