Article | REF: NM610 V1

Radiofrequency cathodic sputtering deposition of nanometric films

Author: Gilles RENOU

Publication date: April 10, 2006 | Lire en français

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    2. Low pressure, low temperature discharge

    2.1 Diode discharge

    To create a discharge in a gas between two conductive plates, the electrical rigidity of the medium must be overcome by applying a strong electric field up to an ignition voltage V b . This potential V b depends on the gas and the product of pressure × distance between electrodes.

    The function V b = f (p × d) is represented by Paschen curves (Figure 1 ). These curves are unique for each gas since they depend on the ionization ease of the element, and...

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