1. Micro-machining techniques
In the 1960s, the first micromachining processes were developed for suspended membranes and other components used in pressure or acceleration sensors. This is volume micromachining. The principle involves applying a photolithographic mask to monocrystalline silicon, which is irradiated with UV light. The exposed areas are then etched with alkaline products to produce different shapes depending on the crystallographic orientation of the silicon (figure 1 ).
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Micro-machining techniques
Scaling effects in electromechanical converters
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