6. Conclusion and outlook

Microsystems are defined as miniaturized systems that perform multiple functions, such as environmental perception, data shaping, processing and transmission, decision-making and environmental action. In application fields such as healthcare engineering, automotive, space, telecommunications, etc., the advantages of miniaturization are numerous: reduced energy consumption, increased functionality, use of noble materials, etc. While the feasibility of several technological approaches has been demonstrated, the silicon industry offers the possibility of achieving very advanced device integration and reducing costs through the use of collective manufacturing methods. This is where the concept of "integrated microsystems" comes into its own. The spectacular achievements in recent years of various sensors (strain gauges, temperature probes, optical detectors, etc.) and micromotors micromachined...