Simulation of dynamic behavior
Variable-capacity electrostatic micromotors
Article REF: D3770 V1
Simulation of dynamic behavior
Variable-capacity electrostatic micromotors

Authors : Emmanuel SARRAUTE, Isabelle DUFOUR

Publication date: February 10, 1998, Review date: October 8, 2018 | Lire en français

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5. Simulation of dynamic behavior

In this last paragraph, we study the dynamic behavior of a micromotor "in situation", trying to take into account as accurately as possible the nature of the mechanical load being driven, as well as the dry and viscous friction acting on the rotor.

5.1 Electromechanical model

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5.1.1 Electrical equations

The electrical behavior of electrostatic structures can be explained by linearity relationships between potentials and charge quantities on all conductors present. The coefficients involved in...

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