1. Materials synthesis

1.1 Silicon on sapphire

The architectures of MOSFETs on bulk Si and SOI are shown in figure 1 . Silicon On Sapphire (SOS, figure 2 a) is the godfather of the SOI family. Epitaxial growth of a thin film of silicon on a bulk substrate of sapphire (Al ₂ O ₃ ) materializes in the formation of small islands of Si that eventually coalesce. The interfacial transition region contains numerous defects, residues...