Miniaturization of components
Silicon-on-insulator technology

Quizzed article REF: E2380 V2

Miniaturization of components
Silicon-on-insulator technology

Authors : Sorin CRISTOLOVEANU, Francis BALESTRA

Publication date: August 10, 2013, Review date: January 13, 2021 | Lire en français

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7. Miniaturization of components

7.1 Short channel effects

The downscaling rules developed for the MOS transistor on bulk Si converge on the need to reduce junction thickness and increase the doping level of the -

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Bibliography

(1) - CRISTOLOVEANU (S.), LI (S.S.) - Electrical characterization of SOI Materials and Devices. - Kluwer, Norwell (1995).
(2) - CRISTOLOVEANU (S.) - Silicon films on sapphire. - Rep. Prog. Phys., 3, 327 (1987).
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