1. Mapping and in-depth analysis

1.1 Auger microscopy

The acquisition of a secondary electron image of the sample surface using scanning electron microscopy (SEM) is a prerequisite for any Auger analysis, as this acquisition allows the area of interest to be selected for subsequent spot analysis. The acquisition of a local spectrum can be extended by xy mapping (or profiling along a preferred x direction) of one or more given elements by measuring, during the scan of the incident probe, the evolution of the intensity of the corresponding Auger lines. The approach is therefore similar to that used to acquire an image in scanning electron microscopy, replacing the detection of secondary electrons with the detection of one or more signals, each corresponding to a preselected energy interval of the Auger spectrum delivered...