1. Mapping and in-depth analysis
1.1 Auger microscopy
The acquisition of a secondary electron image of the sample surface using scanning electron microscopy (SEM) is a prerequisite for any Auger analysis, as this acquisition allows the area of interest to be selected for subsequent spot analysis. The acquisition of a local spectrum can be extended by xy mapping (or profiling along a preferred x direction) of one or more given elements by measuring, during the scan of the incident probe, the evolution of the intensity of the corresponding Auger lines. The approach is therefore similar to that used to acquire an image in scanning electron microscopy, replacing the detection of secondary electrons with the detection of one or more signals, each corresponding to a preselected energy interval of the Auger spectrum delivered...
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Mapping and in-depth analysis
Applications of Auger spectromicroscopy
Bibliography
References
Standardization
- Analyse chimique des surfaces - Comité technique ISO/TC 201 -
- Chemical analysis of surfaces – Thickness profiling by bombardment – Optimization using single- or multi-layer systems as reference materials - ISO 14606:2000 - 10-00
- Chemical analysis of surfaces – Information protocols - ISO 14975:2000 - 12-00
- Chemical analysis of surfaces – Protocol for data transfer - ISO 14976:1998 - 7-98
- Chemical...
Databases and software
See also the manufacturers' websites.
Surface and Nano-analysis Basics, NPL
http://www.npl.co.uk/nanoanalysis/surfanalbasics.html#aes
NPL Auger Electron Spectrometer Intensity Calibration Software
Organizations
Versailles Project on Advanced Materials and Standards (VAMAS)
ASTM International, Surface and Analysis (Committee 42)
National Institute of Standards and Technology (NIST), Surface and Microanalysis...
Manufacturers, builders
(non-exhaustive list)
There are a significant number of accessory manufacturers (electron and ion guns, analyzers, UV chambers, etc.) that are not mentioned here. The same applies to companies supplying ESCA, mixed ESCA-Auger, or LEED-Auger spectroscopy equipment (and not specifically Auger-SAM). The following list is therefore not exhaustive.
JEOL
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