Article | REF: P2621 V1

Auger spectroscopy - Imaging and Z-profile. Applications

Author: Jacques CAZAUX

Publication date: June 10, 2007 | Lire en français

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3. Specificity and prospects of Auger spectromicroscopy

The examples of applications mentioned above have highlighted the importance of analyzing surfaces and interfaces, focusing primarily, but not exclusively, on the role of Auger spectromicroscopy. In the following, the specificity of this technique is clarified in order to identify its areas of excellence and future prospects.

3.1 Comparison with other techniques

Auger spectromicroscopy shares a number of similarities with other techniques, but also has specific differences.

  • Scanning electron microscopy (SEM) and X-ray microanalysis: we observed ([ ] § 2.1) that the architecture of Auger devices also allowed for the prior acquisition of secondary electron images comparable to those obtained with...

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Specificity and prospects of Auger spectromicroscopy