Cathodoluminescence detection systems

There are several types of cathodoluminescence experiments:

• polychromatic imaging: all the light emitted by the sample is collected and the electron beam is scanned to visualize the distribution and intensity of the total emission;

• spectroscopic analysis: the variation in luminescence intensity as a function of the wavelength of the light emitted by a very small area of the sample is collected; the electron beam is then fixed;

• monochromatic imaging: the emission wavelength to be analyzed is selected, and the electron beam is scanned to visualize the distribution and intensity of this emission in the sample.

A cathodoluminescence experiment requires (figure