1. Instrumentation
Ion beam analysis methods are based on the use of low-energy charged particle gas pedals. These small gas pedals produce light ions (
1
H
+
,
2
D
+
,
3
He
+
,
4
He
+
...) accelerated to energies of between 250 keV and 5 MeV. The interaction between the ions and the target to be analyzed generally takes place in a vacuum analysis chamber, although some devices allow analysis in air. The emitted X-rays are then detected and analyzed according to the principles of conventional X-ray spectrometry
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Instrumentation
Multi-element analysis
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