5. Conclusion

In this article, we have attempted to take stock of the microanalysis methods that have now established themselves as an indispensable means of investigation for scientific and technical progress. The question is: are there still major developments to be expected from these methods, or have they reached full maturity?

We can help to answer this question by discussing two points on which, as a whole, these methods should make progress in the near future.

The principle of microanalysis is to explore matter using probes that are as small as possible. High-resolution transmission electron microscopy has reached its limits in this field. On the other hand, great progress is expected in ion microanalysis (SIMS), with the realization of submicron ion probes on the next generations of equipment. The use of these probes, still reserved for a few...