Microanalysis based on ion irradiation
Microanalysis of surfaces and thin films
Article REF: P3795 V2
Microanalysis based on ion irradiation
Microanalysis of surfaces and thin films

Author : Guy BLAISE

Publication date: October 10, 1990, Review date: January 5, 2014 | Lire en français

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3. Microanalysis based on ion irradiation

A description of the physical principles involved and the methods of analysis can be found in the articles of this treatise:

  • Analysis by direct observation of nuclear reactions. Backscattering of charged particles and nuclear microprobe [P 2 563] ;

  • Charged particle induced X-ray analysis ;

  • Secondary Ion Emission Analysis SIMS .

3.1 Theoretical...

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