Main interactions used

Nuclear microprobe — Principle and equipment

Figure 1 - Main interactions exploitable for analytical purposes in a nuclear microprobe

Figure 2 - Schematic representation of stopping power as a function of energy

Figure 3 - Proton and helium-4 ion pathways in aluminum, copper and gold (SRIM2004 data [12])

Figure 4 - Principle of particle-induced X-ray emission (PIXE)

Figure 5 - Micro-PIXE of a mineral sulfide; trace elements: K, Ca, Ba, Cr, Mn, As, Se

Figure 6 - Production of vacancies in inner layers by proton bombardment (from [6])

Figure 7 - Sensitivity as a function of atomic number and proton energy for organic samples (from [4])

Figure 8 - Comparative paths of electrons, protons and 4-helions in ZrO 2

Figure 9 - Schematic representation of the collision between a particle of mass M1, animated by a velocity V0 and an atom of mass M2 at rest.

Figure 10 - Variation of the correction factor F, describing the deviation from Rutherford&#039;s law, with energy and atomic number (from [13])

Figure 11 - Effective cross-section of elastic scattering of helium by oxygen (from [14])

Figure 12 - Schematic representation of an RBS spectrum for 3 MeV α particles (YAlO 3 sample).

Figure 13 - RBS spectrum recorded on an 80 nm Cu film deposited on solid Al 2O3 (4He of 1.25 MeV, detection angle 150˚).

Figure 14 - Experimental set-up for conventional RBS

Figure 15 - Experimental RBS spectrum obtained on massive YBaCuO and simulation using SIMNRA ( 4He of 3.2 MeV, detection angle 170˚).

Figure 16 - Diffusion geometry in classic ERDA

Figure 17 - ERDA transmission geometry

Figure 18 - Transmission elastic scattering geometry with coincidence detection

Figure 19 - Principle of in-depth analysis by resonant reaction

Figure 20 - Comparative cross sections for X-ray emission (PIXE), elastic scattering (RBS) and nuclear reaction (from [39])

Figure 21 - Channelling charged particles

Figure 22 - SEM image of a Fresnel microlens produced by micromachining a polymer deposited on silicon (from [64])

Figure 25 - Beam envelope of four quadrupole lenses (from [84])

Figure 26 - Optical configurations with enhanced performance (from [86][87])