Conclusion

The special performance of materials microanalysis by secondary ion emission makes it a necessary instrument in the following cases:

• analysis and quantitative determination of trace impurities (less than 1 at. %, and up to 0.1 ppb at) in solids, especially semiconductors;

• analysis and dosing of depth profiles over distances well below 1 μm from the surface;

• analysis of thin films (thicknesses between 1 nm and a few μm) and corresponding interfaces;

• molecular analysis of organic materials, especially polymers;

• static-mode surface analysis of organic and inorganic materials ;

• sub-micrometer spatial localization of elements, especially trace elements, or molecular or mineral...