2. Quantitative analysis
Obtaining true concentrations in a material is one of the method's weak points, due to the complexity and variability of sputtering and ionization processes under particle bombardment. However, a number of procedures are available for quantitative analysis. The problems of selectivity and sensitivity obviously arise in the same terms as before, and the experimental procedures for optimizing measurements remain the same.
2.1 General expressions
The phenomenological expression for the ionic intensity (number of particles per unit time) collected for a given ionic species A ± is written :
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Quantitative analysis
Static SIMS surface analysis
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