Overview
ABSTRACT
Phase Shifting interferometry is the most widely method used for characterizations of optical surfaces, such as mirrors used in laser installations, beamlines in synchrotrons, and applications in astrophysics.
The Réseau Optique et Photonique (ROP) of the Mission for Transverse and Interdisciplinary Initiatives (MITI) at CNRS has established a working group on comparative metrology, particularly in phase scanning interferometry. Five laboratories from academic institutions (CNRS, CEA, and universities) have joined to assess their capabilities in interferometric metrology
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Read the articleAUTHORS
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Muriel THOMASSET : Member of the Steering Committee and the "Comparative Metrology" Working Group of the Optics and Photonics Network, Mission pour les Initiatives Transverses et Interdisciplinaires, CNRS. - Center de Nanosciences et de Nanotechnologies, Palaiseau – Synchrotron SOLEIL, Gif sur Yvette
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Johan FLORIOT : Member of the "Comparative Metrology" Working Group of the Optics and Photonics Network, Mission pour les Initiatives Transverses et Interdisciplinaires, CNRS. - Marseille Astrophysics Laboratory
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Laurent PINARD : Member of the "Comparative Metrology" Working Group of the Optics and Photonics Network, Mission pour les Initiatives Transverses et Interdisciplinaires, CNRS. - Advanced Materials Laboratory, Villeurbanne
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Marc ROULLIAY : Member of the "Comparative Metrology" Working Group of the Optics and Photonics Network, Mission pour les Initiatives Transverses et Interdisciplinaires, CNRS. - Charles Fabry Laboratory, Palaiseau
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Sylvain SAVALLE : Member of the "Comparative Metrology" Working Group of the Optics and Photonics Network, Mission pour les Initiatives Transverses et Interdisciplinaires, CNRS. - Laboratory for the Use of Intense Lasers, École Polytechnique, Palaiseau
INTRODUCTION
Measuring an optical surface using a phase-scanning interferometer is a fairly simple and quick technique to implement . Ensuring the validity of the results obtained is a more difficult task. Good measurement control requires regular instrument calibration procedures, measurement of preserved objects to observe drifts, and inter-laboratory comparisons.
In order to improve the metrological approach of certain academic metrology laboratories, the ROP has set up a working group called GT métrologie comparative on interferometric measurements for surface and roughness analysis.
The aim of this comparative metrology was, through the measurement of flat and spherical mirrors, to compare the different measurement and analysis methods of each of the participants. Then, on the basis of the results obtained, to develop a common methodology.
The participants met several times beforehand to discuss their working methods and measurement techniques. Test objects were thus defined, and some participants provided objects relevant to the desired observations: reconstruction capacity for low and medium spatial frequencies (from 1 mm –1 to 1 cm –1 ), instrument measurement capacity limits for flatness and roughness.
To achieve this, 3 silica mirrors were exchanged during the intercomparison: 2 flat mirrors and 1 spherical mirror.
Similarly, two 1-inch-diameter substrates, one in silica, the other in silicon, were exchanged for roughness measurements.
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KEYWORDS
measurement technique | interferometry | metrology | synchrotron | mirror | optical surface
Metrology of optical surfaces by the Réseau Optique et Photonique at CNRS
Measurement methods and instruments used
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