Availability of nanoscale reference materials
Reference materials for nanometrology - Current situation

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R6743 V1 Article

Availability of nanoscale reference materials


Reference materials for nanometrology - Current situation

Author : Nicolas FELTIN

Publication date: September 10, 2025 | Lire en français

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4. Availability of nanoscale reference materials

The main players in the production of MR(C) dedicated to nanometrology are essentially National Metrology Institutes (NIST (USA), BAM (Germany), DFM (Denmark), NMIJ (Japan), KRISS (South Korea)) or assimilated (JRC-IRMM) and some private companies (ThermoFisher, Polysciences, Whitehouse Scientific, VLSI Standards, etc.). The latter, however, mostly offer second-level reference materials, for example traceable to MRs developed by National Metrology Institutes, and the information provided is unfortunately often incomplete from a metrology point of view (methods used, details of uncertainties, etc.).

It should also be noted that MR(C) are marketed under different trade names, such as ERM (CE), SRM (NIST) or other names specific to private companies.

Various databases exist to list the MR(C) available,...

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