1. ALD and sensors
Sensors are important devices with many applications in everyday life. The ability to detect and quantify the presence of gases, pH, various species/molecules in solution, UV radiation, etc. is essential for environmental or safety reasons, as well as for industrial process control or medical diagnostics and monitoring.
Sensors consist of a transducer, which is the sensitive part that changes its physical properties in the presence of the species to be detected, and a device for measuring the change in properties of the transducer. For example, in the case of gas detection, the sensitive part is often a metal oxide, either in the form of a film or a compacted powder, whose electrical conductivity is influenced by adsorption of the targeted gas.
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ALD and sensors
ALD and biosensors
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