1. Materials synthesis
1.1 Silicon on sapphire
The architectures of MOSFETs on bulk Si and SOI are shown in figure 1. Silicon On Sapphire (SOS, figure 2a) is the godfather of the SOI family. Epitaxial growth of a thin film of silicon on a bulk substrate of sapphire (Al2O3) materializes in the formation of small islands of Si that eventually coalesce. The interfacial transition region contains numerous defects, residues of imperfect matching of the thermal coefficients and crystal lattices of silicon and sapphire, as well as exodiffusion...
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Materials synthesis
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