5. Measuring surface contamination
In the vacuum system, there are two types of contamination, depending on requirements:
contamination by the gaseous atmosphere, which is accessible through residual gas analysis;
surface contamination caused by physico-chemical treatments, which can be accessed using surface analysis techniques (Auger spectroscopy, S.E.M. Scanning Electron Microscope - X.P.S. Xray Photoelectron Spectroscopy); all these techniques can be used to measure the cleanliness of an enclosure
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Measuring surface contamination
Conclusion: Vacuum quality. Clean vacuum
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